JPS6364441U - - Google Patents
Info
- Publication number
- JPS6364441U JPS6364441U JP15984586U JP15984586U JPS6364441U JP S6364441 U JPS6364441 U JP S6364441U JP 15984586 U JP15984586 U JP 15984586U JP 15984586 U JP15984586 U JP 15984586U JP S6364441 U JPS6364441 U JP S6364441U
- Authority
- JP
- Japan
- Prior art keywords
- suction cup
- elastic suction
- recess
- chuck
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15984586U JPS6364441U (en]) | 1986-10-18 | 1986-10-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15984586U JPS6364441U (en]) | 1986-10-18 | 1986-10-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6364441U true JPS6364441U (en]) | 1988-04-28 |
Family
ID=31084662
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15984586U Pending JPS6364441U (en]) | 1986-10-18 | 1986-10-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6364441U (en]) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0435810U (en]) * | 1990-07-23 | 1992-03-25 | ||
| JP2001113435A (ja) * | 1999-10-13 | 2001-04-24 | Ibiden Co Ltd | 基板の吸着部材，固定装置及び切断装置 |
| KR20200123993A (ko) * | 2019-04-23 | 2020-11-02 | 주식회사 탑 엔지니어링 | 가압유닛이 구비된 도포 장치 및 이를 이용한 도포 방법 |
-
1986
- 1986-10-18 JP JP15984586U patent/JPS6364441U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0435810U (en]) * | 1990-07-23 | 1992-03-25 | ||
| JP2001113435A (ja) * | 1999-10-13 | 2001-04-24 | Ibiden Co Ltd | 基板の吸着部材，固定装置及び切断装置 |
| KR20200123993A (ko) * | 2019-04-23 | 2020-11-02 | 주식회사 탑 엔지니어링 | 가압유닛이 구비된 도포 장치 및 이를 이용한 도포 방법 |